Object-Oriented Simulation Software Modeling of a Semiconductor Wafer Fab
碩士 === 長庚大學 === 資訊管理研究所 === 94 === Because of the invention of very large scale integration(VLSI)technology, the semiconductor industry has been one of the most important industry. And because of this, the electronic industries grow faster than ever in the last fifty years. In order to improve the...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2006
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Online Access: | http://ndltd.ncl.edu.tw/handle/49282455706762140887 |