Object-Oriented Simulation Software Modeling of a Semiconductor Wafer Fab

碩士 === 長庚大學 === 資訊管理研究所 === 94 === Because of the invention of very large scale integration(VLSI)technology, the semiconductor industry has been one of the most important industry. And because of this, the electronic industries grow faster than ever in the last fifty years. In order to improve the...

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Bibliographic Details
Main Authors: Chiachi Hung, 洪家齊
Other Authors: Chunyi Lin
Format: Others
Language:zh-TW
Published: 2006
Online Access:http://ndltd.ncl.edu.tw/handle/49282455706762140887