Physical Porperties of AlGaN epifilms

碩士 === 國防大學中正理工學院 === 應用物理研究所 === 94 === In the thesis, we measured and analyzed the dielectric properties of AlGaN epitaxial film. Under the conditions of temperature from 90 K to 460 K and frequency of external electric field from 20 Hz to 1 MHz, the capacitance and dissipation factor of AlGaN epi...

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Bibliographic Details
Main Authors: Teng Yu Te, 鄧友德
Other Authors: J C Wang
Format: Others
Language:zh-TW
Published: 2006
Online Access:http://ndltd.ncl.edu.tw/handle/82499518537182960238