Physical Porperties of AlGaN epifilms
碩士 === 國防大學中正理工學院 === 應用物理研究所 === 94 === In the thesis, we measured and analyzed the dielectric properties of AlGaN epitaxial film. Under the conditions of temperature from 90 K to 460 K and frequency of external electric field from 20 Hz to 1 MHz, the capacitance and dissipation factor of AlGaN epi...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2006
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Online Access: | http://ndltd.ncl.edu.tw/handle/82499518537182960238 |