The Effects of Intermediate Layer and Substrate on the Mechanical Properties of Thin Film by Elastic Hertz Contact Solution and Finite Element Method

碩士 === 大同大學 === 機械工程學系(所) === 93 === This research uses hertz contact elastic solution and finite element law to discuss the influence on thin film’s mechanical characteristic from using different substrates and intermediate layers. Hertz contact elastic solution, which is used for researching the i...

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Bibliographic Details
Main Authors: Wen-Ke Yu, 俞文戈
Other Authors: S.S. Tzeng
Format: Others
Language:en_US
Published: 2005
Online Access:http://ndltd.ncl.edu.tw/handle/13816905752858868575