The Effects of the Intermediate Layer and Surface Roughness on the Mechanical Properties of Diamond Like Carbon Films
碩士 === 大同大學 === 機械工程學系(所) === 93 === This thesis utilized plasma enhanced chemical vapor deposition (PECVD) to produce DLC by methane (CH4) on three different substrates, silicon wafer, Corning 1737 glass, and Kyocera A493 ceramic with two different thicknesses of titanium and chromium as the interm...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13836997286174919387 |