Particle Counting Chip

• Main Authors: Ming-Zen Lin, 林銘哲
• Other Authors: 黃榮堂
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/5gq78z

碩士 === 國立臺北科技大學 === 機電整合研究所 === 93 === In this paper, we use CMOS technology and MEMS technology to produce particle counting chip witch includes trapping electrode、micro flue channel and ion pore . Let particles drop in chip inlet then use dielectrophoresis(DEP) force to concentrate and induce particles. When the particles pass through the micro-pore, the micro-pore’s current will reduce then use transimpedance amplifier to amplify small signal of nano ampere current. As a result, we can get the number of particles by recording the reduction events of the voltage. In order to provide practicability of device, we use CFD-RC, a simulation software, to simulate the strength and distribution of electro-field and follow the result of simulation to design chip . In experiment, we use MEMS process to fabricate the micro-electrode and flue channel on the glass substrate and use CMOS process to fabricate the transimpedance amplifier and ion pore. Then combine two fabrication to finish particle countering chip. We believe this new particle counting chip may be an alternative instead of employing traditional fluorescence labeling to identify particles’ number, and can correctly count the quantity of specific particles.