Particle Counting Chip
碩士 === 國立臺北科技大學 === 機電整合研究所 === 93 === In this paper, we use CMOS technology and MEMS technology to produce particle counting chip witch includes trapping electrode、micro flue channel and ion pore . Let particles drop in chip inlet then use dielectrophoresis(DEP) force to concentrate and induce part...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/5gq78z |