Growth and Characteristics of Zn-doped InN Alloys on Sapphire by RF Reactive Magnetron Sputtering
碩士 === 國立臺北科技大學 === 光電工程系所 === 93 === This dissertation investigates the growth and characteristics of Zn-doped Indium nitride alloys on (0001) Sapphire substrate by RF reactive magnetron sputtering. By changing the deposition conditions such as chamber pressure, nitrogen flow rate and RF power, we...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/jbmjvv |