Synthesis of SiGe Nanowires for Field Effect Transistor
碩士 === 東海大學 === 物理學系 === 93 === In this study, we attempt to develop a novel approach to fabricate nanowire-based FET on glass by traditional semiconductor process. This investigation was divided into two parts. The first one is concentrated on the synthesis and characterization of Si nanowires, Ge...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/29309224399795210415 |