Design and Analysis of Electrostatic Micromotor

• Main Authors: Yi-Ting Yu, 余怡廷
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/sg7bqy

碩士 === 國立虎尾科技大學 === 動力機械工程研究所 === 93 === In recent years, the development of the MEMS component technology is quite fast, many countries invest the huge fund to research and develop relevant application, and regard micromotor as the technology of driving the component, it is the mainstream of MEMS technology even more. Regard the small size of MEMS, the electrostatic force can be used for the way to drive effectively. Therefore, this thesis will probe into the optimum electromechanical parameter of the electrostatic micromotor. At present, studying micromotor meet issue nothing more than operation torque is not smooth-going, low operation torque and low lifetime etc. In order to improve above-mentioned problems, this thesis uses of finite element software ANSYS to analyse the electric field characteristic of the micromotor. For the improving operation characteristic of the micromotor, this thesis will probe into the two kinds of wobble and pole electrostatic micromotor following problems are included：(1) the better design of electromechanical parameters in micromotor, (2) different modes of voltage are excited on the micromotor, (3) improving factor of influence on operation for micromotor is proposed. Above-mentioned problems will influence the electric field intensity and electrostatic force of the micromotor, and influence the operation torque, therefore, investigations should be continuous, analyse incomes may become important reference of design for micromotor in this thesis.