Design and Analysis of Electrostatic Micromotor
碩士 === 國立虎尾科技大學 === 動力機械工程研究所 === 93 === In recent years, the development of the MEMS component technology is quite fast, many countries invest the huge fund to research and develop relevant application, and regard micromotor as the technology of driving the component, it is the mainstream of MEMS t...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/sg7bqy |