Electrostatic Effect between Tip Electrode and μ-EDMed surface
碩士 === 國立虎尾科技大學 === 動力機械工程研究所 === 93 === An electrostatic force which is often acted as the drive force in the micro scale field should be strongly influenced by the change of the gap between electrodes.However,most of the researches have not considered the surface profile while analysing the elect...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/tj3t44 |