The Preparation of Single-Crystal ZnO Film and Its Application on Layered SAW Device
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 93 === Abstract High quality piezoelectric ZnO thin film on room temperature by RF magnetron sputtering technique. The ZnO films on room temperature were deposited at r.f. power of 175 W, working pressure of 10 mTorr which have been excellent single-crystal str...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/abj56g |