Investigation of Si thin films Recrystallization Mechanism during Excimer Laser Annealing Using In-situ Time-Resolved Optical Reflection and Transmission Measurement
碩士 === 國立臺灣科技大學 === 機械工程系 === 93 === An in-situ real-time time-resolved optical reflectivity and transmissi vity (TRORT) monitoring system combining a CW He-Ne laser, a fast digital oscilloscope and two photodiodes is developed for monitoring the melt-phase duration and examine the melting and cryst...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02618242250394284806 |