Dynamic Simulation and Vibration Analysis of the Atomic Force Microscope by Finite Element Method

• Main Authors: Wu-chih Chen, 陳武志
• Other Authors: C.-L. Liao
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/35014149684667234337

碩士 === 國立臺灣科技大學 === 機械工程系 === 93 === The purpose of this study is to derive the equations of motion and to investigate the vibrations of the atomic force microscope (AFM), which includes the contact mode and noncontact mode. At first, the equations of motion of the AFM micro cantilever including the base oscillator and the piezoelectric actuator are derived by Hamilton’s principle. In the dynamic analysis, the piezoelectric layer is treated not only as a sensor to measure the deflection of the microcantilever but also as an actuator to excite the microcantilever by an external voltage. The repulsive force and van-der-Waals force are considered in the contact mode and noncontact mode of the AFM, respectively. Some important observations are made from the equations of motion and boundary conditions. Finally, numerical results using the finite element method are provided to illustrate the excitation effects of base oscillator and piezoelectric actuator on the dynamic response of the microcantilever.