Dynamic Simulation and Vibration Analysis of the Atomic Force Microscope by Finite Element Method
碩士 === 國立臺灣科技大學 === 機械工程系 === 93 === The purpose of this study is to derive the equations of motion and to investigate the vibrations of the atomic force microscope (AFM), which includes the contact mode and noncontact mode. At first, the equations of motion of the AFM micro cantilever including the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35014149684667234337 |