Improvement of Rapid Thermal Oxide Quality by AnodizationCompensation Technology
碩士 === 國立臺灣大學 === 電子工程學研究所 === 93 === Abstract With the progressive development of integrated circuits (IC) and the semiconductor industry, each step in semiconductor fabrication technology is becoming more and more important. The control of the processing step is related to the performance and rel...
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| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/28980339856621868034 |