Thermal conductivity measurement of metal thin films
碩士 === 國立清華大學 === 工程與系統科學系 === 93 === Thin film materials are basic components of micro solid-state devices. There will be a great contribution to efficiency and heat transfer characteristics of micro devices if we can understand the thermal conductivity properties of thin films efficiently. Further...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/21069261177761887248 |