Characteristic Analysis and Control of an Ultrasonic Actuator Stage
碩士 === 國立清華大學 === 工程與系統科學系 === 93 === The proposed disc-type ultrasonic actuator is made of a piezo buzzer element (diameter is 41 mm, thickness is 0.2 mm). It can be made as “4 bolts -θ-structure mode” actuator by fixing four bolts arranged in “90°- 90°-θ- (180°-θ)”along the border of actuator. The...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/81228502063292514425 |