An Integrated Mass Flow Control Key Component
博士 === 國立清華大學 === 電子工程研究所 === 93 === Abstract A monolithic design and fabrication process is proposed and realized for the thermal buckling micro valve and the built-in flow channel mass flow sensor modules in the thesis. The manufacturing procedure for the mass flow sensing and control devices d...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/12213065700938426611 |