Temperature and Pressure Holding Time Effect on Formation of Metallic Patterns by Nanoimprint Technology — Molecular Dynamics Simulation and Nanoimprint Experiment
碩士 === 國立清華大學 === 動力機械工程學系 === 93 === This thesis presents a theoretical and experimental study on the formation of nano-scale patterns on gold thin film by using nanoimprint technique. The aim is to study the effect of different manufacturing environments, temperature and pressure holding time, on...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/47663292538068352111 |