The Stress Analysis and Nanoindentation Properties of Film / Substrate System
碩士 === 國立清華大學 === 材料科學工程學系 === 93 === We use two kinds of specimen, the soft film / hard substrate system (amorphous silicon film deposited on (100) silicon) and the hard film / soft substrate system (amorphous germanium film deposited on PET (polyethylene terephthalate), to analyze the mechanical p...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/am56uk |