Tool WPH Monitor and Management System and Its Empirical Study in Semiconductor Manufacturing
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 93 === Recently the semiconductor industry is facing dramatic changes owing to global competition and technology reaching post-Moore’s law. The investment of capacity expansion usually takes huge amount, which is over 3 Billion US$ for advanced 300mm fab. Therefore,...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2005
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Online Access: | http://ndltd.ncl.edu.tw/handle/88595629610237105041 |