A study on phenemona induced by nano-particle motion upon work surface：effects of particle rigidity and geometry
碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 93 === The surface phenemona in polishing process induced by nano-particle was studied in this thesis. The properties of particle, rigidity and geometry, are forced. A perfect polished surface includes lower roughness and thinner damage layer. Besides a perfect sur...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/87518576741336144543 |