Design Procedures of a Multi-Stage Turbo Molecular Pump
碩士 === 國立屏東科技大學 === 機械工程系 === 93 === Turbo molecular pump can provide good air-removal effect in free molecular flow to the ultra high vacuum status. The blade geometries and arrangement have a great influence on pump speed and compression ratio. In this research, direct simulation of Monte Carlo me...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35548208563072399829 |