Patterning Technology of Nanoumprint Lithography
碩士 === 國立彰化師範大學 === 機電工程學系 === 93 === Temperature and pressure are quite important parameters for the shaping of nanoimprint lithography technology. It will transform the structure on the mold into polymer, so we need to heat and exert pressure to make the structure on the mold transform into polyme...
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| Format: | Others |
| Language: | zh-TW |
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2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/54447127167608190532 |