Optimal Design and Dynamic Analysis for θ Micropositioning Stage
碩士 === 國立彰化師範大學 === 機電工程學系 === 93 === The thesis mainly offers a new way for the design of the platform of a micro θ angle, which compensates the axial deviation produced by the traditional microposition platform. The output displacement of the platform is increased by using the lever type structure...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2005
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Online Access: | http://ndltd.ncl.edu.tw/handle/07015125090253415326 |