Friction Behavior and Control Design for Piezo-Actuated Stage in Micro-Scale
碩士 === 國立彰化師範大學 === 機電工程學系 === 93 === Abstract The aim of this paper is to improve the tracking problem of piezoelectric actuator (PEA) in precision motion control. The tracking control accuracy of the piezoelectric actuator is limited due to their inherent hysteretic nonlinearity. Direct drive...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/48128741029693874000 |