Investigation of Growth and Characteristics of Si Nanoclusters Embedded in Si Oxide Film
碩士 === 國立中央大學 === 光電科學研究所 === 93 === In this thesis, we present a novel laser-assisted chemical vapor deposition (LACVD) system for growing Si nanoclusters embedded in a Si oxide matrix at a room temperature. This LACVD system was constructed by combining a conventional plasma enhanced chemical vapo...
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| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/06871872030623779467 |