DC magnetron sputtering of optical thin films in low energy ion beam
博士 === 國立中央大學 === 光電科學研究所 === 93 === Magnetron sputtering is a low temperature deposition process and suitable for use with polymer substrates. However, the films deposited by magnetron sputtering did not have perfect optical properties due to the low temperature process. In this study, we combined...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13523658375749592425 |