The simulations of increasing DOF and improving Forbidden Pitch by Scattering Bar (SB), and fabrication of Whole Bar Attenuation (WBA)
碩士 === 國立交通大學 === 應用化學系所 === 93 ===
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/82659091190326759493 |