| Summary: | 碩士 === 國立交通大學 === 機械工程系所 === 93 === High speed is an important issue in the semiconductor processing equipment. In usual, the chip need to be transferred frequently in the semiconductor back-end processing; therefore the pick and place mechanism plays an important role in the semiconductor processing equipment.
Beside the semiconductor processing equipment, pick and place mechanism is also used in many other areas. Many kinds of mechanism can achieve the purpose of pick and place, but due to the different characteristics, the design result and effects are different.
Crank rocker mechanism has two toggle points, where the crank and coupler are along the same line, small vibration is occurred in the said two toggle points. By using crank rocker as a pick and place mechanism, the vibration can be reduced and precision can be induced; which causes the designer’s work much more simple.
In this thesis, the principles of machine design, mechanisms, and mechanics of material are used. The design constraints are carried out, and the crank rocker is used to design a chip’s pick and place mechanism. A chip’s pick and place mechanism designed by ITRI is also shown in order to compare with the present design. Computer software ADAMS and Nastran are used to assist the design procedures. ADAMS is used to analyze the dynamic performance of mechanism, which can also help to optimize the present design. Nastran is used as a tool to check the stiffness of each bar and show the finite element result of the chip’s pick and place mechanism in the present design.
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