Design of a High Speed Mechanism for Chip's Pick and Place
碩士 === 國立交通大學 === 機械工程系所 === 93 === High speed is an important issue in the semiconductor processing equipment. In usual, the chip need to be transferred frequently in the semiconductor back-end processing; therefore the pick and place mechanism plays an important role in the semiconductor processin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60875706482568780689 |