A Study of the Stress in the Ultra Low Dielectric Constant Nanoporous Silica Thin film

碩士 === 國立交通大學 === 材料科學與工程系所 === 93 ===

Bibliographic Details
Main Author: 林大憲
Other Authors: 潘扶民
Format: Others
Language:zh-TW
Published: 2005
Online Access:http://ndltd.ncl.edu.tw/handle/57326112593821114951