A Study of the Stress in the Ultra Low Dielectric Constant Nanoporous Silica Thin film
碩士 === 國立交通大學 === 材料科學與工程系所 === 93 ===
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2005
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Online Access: | http://ndltd.ncl.edu.tw/handle/57326112593821114951 |