Fabrication and applications of nano-gap electrode arrays
碩士 === 國立暨南國際大學 === 電機工程學系 === 93 === Nowadays, the fabrication of nano electrodes is mainly done by electron beam lithography (E-beam lithography). However, there are some drawbacks of E-beam lithography, such as low throughput and high productive cost. In order to have higher throughput to depoly...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77657551690894469666 |