A Novel of ZnO/Al2O3 micro transparent thin-film heater
碩士 === 國立成功大學 === 微機電系統工程研究所 === 93 === Common transparent conductive oxides (TCO) include indium tin oxide (ITO), SnO2, and ZnO. Among them, ITO thin films contain a very high concentration of indium, which is a very expensive material. On the other hand, alumina doped zinc oxide (ZAO) has attra...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/37794483319543158450 |