Development of a Measurement System to Measure Static and Dynamic Mechanical Properties of Miniature Specimens
博士 === 國立成功大學 === 機械工程學系碩博士班 === 93 === Along with the development in MEMS technology, the mechanical properties of miniature materials should be confirmed to insure the reliability and durability. The mechanical properties of micro-structures affect the performance and reliability of MEMS devices...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/71546834783678289210 |