Miniature Piezoelectric Conical Transducer:Fabrication, Evaluation, and Application
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 93 === The objective of this paper is to investigate thefeasibility of using excimer laser micro-machining technique to fabricate small conical PZT elements with an aperture size around 250 or less. The machined PZT element is then used to construct a miniature acou...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/22132203031175716176 |