Fabrication of the stacked microstructures and optical microlens using thick photoresist
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 93 === This study utilizes the LIGA-like processes which include thick photoresist lithography, micro-electroforming of metal nickel and vacuum casting to mold the polymer materials structures in order to fabricate the integrated stack microstructures and optical mi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77015541208291466613 |