Investigation and Fabrication of AlGaN/GaN Heterojunction Metal-Semiconductor-Metal (MSM) Photodetectors
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 93 === In this dissertation, the structure of GaN–based Schottky diodes and MSM photodetectors were epitaxied on Al2O3 (sapphire) substrates by metalorganic chemical vapor deposition system (MOCVD). Due to the Schottky contact characteristics of the diodes were d...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/51570307084247432410 |