Optical-Electrical Properties of ZZO Films grown by RF Co-sputter for Ohmic Contact with P type GaN
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 93 === Abstract In this thesis, the materials characteristics of zirconium (Zr) doped zinc oxide (ZnO) films and their contacts on p-type GaN were investigated. The transparent and conductive ZnO films were doped with Zr atoms at concentrations of 8.2, 10 and 15...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2005
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/82886461984556154074 |