Study of Recessed-SAW Devices Fabrication by Proton-Exchange Wet-Etching Technology
博士 === 國立成功大學 === 微電子工程研究所碩博士班 === 93 === Recently, the needs for piezoelectric devices have been greatly increasing with the rapid growth of mobile communication systems. The requirements for the devices have been widely spreading and becoming more critical. In order to satisfy these requirements...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50412551361655388442 |