Synthesis of Acrylic Polymers and TheirApplications on the Chemical AmplifiedPositive Tone Photoresist
碩士 === 國立成功大學 === 化學工程學系碩博士班 === 93 === A series of acrylic copolymers containing acid labile groups and alicyclic units have been synthesized based on tetrahydropyranyl methacrylate (THPMA), tert-butyl methacrylate (t-BMA), (-)-bornyl methacrylate ((-)-BMA), α-methacryloxy-γ-butyrolactone (MABL) a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45745442834952837433 |