Fabrication Study of Various Microstructure using Monolithic Etching Process on (110) Silicon Wafer
碩士 === 國立中興大學 === 精密工程研究所 === 93 === In this research, a novel method to fabricate microstructures on <110>silicon wafer were proposed. A precise bulk etching micro-fabrication processes are to carry out three microstructure fabrications. This process includes depositing 1μm thermal oxide on p...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46294074360428952035 |