Microstructure and Dielectric Properties of RF-Sputtered MgO-doped BaxSr1-xTiO3 Thin Films
博士 === 國立中興大學 === 材料工程學研究所 === 93 === Thin films of rf-sputtered Ba1-xSrxTiO3 (BST) with appropriate MgO doping contents were deposited on Pt/Ti/SiO2/Si substrate. BST thin film doped with MgO is expected to improve the dielectric and leakage properties. Microstructure, chemistry, and dielectric pro...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/33739011532006914524 |