Growth and Characterization of Poly-Silicon Thin Films Using Hot-Wire Chemical Vapor Deposition
碩士 === 國立中興大學 === 材料工程學研究所 === 93 === Recently, polysilicon has received intense attention for thin-film solar cell and transistor applications. There are several methods to deposit low-temperature polysilicon thin films. In this study, the polysilicon films were prepared by hot-wire chemical vapor...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/92841668116823267870 |