Study of polysilicon film induced by nano Au on armorphous silicon film
碩士 === 崑山科技大學 === 機械工程研究所 === 93 === In this thesis, nano gold powder, (Au), triggered anisotropic amorphous Silicon, ( a-Si ), thin film is applied for the research of crystallized polycrystalline silicon ,( poly-Si ), films on optpelectronic device. This process first utilizes direct-reduction pro...
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| Format: | Others |
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2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/72109299760412231630 |