A Study on Metallic Electrode Materials of Surface Acoustic Wave Devices
碩士 === 義守大學 === 材料科學與工程學系碩士班 === 93 === The surface characteristic, mechanical properties and microstructure of the sputtered Al and Ti film on quartz and LiTaO3 piezoelectric structure were investigated in this study. The influences of the simulated reflow process and HTS reliability test were stud...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99537812176450420581 |
| Summary: | 碩士 === 義守大學 === 材料科學與工程學系碩士班 === 93 === The surface characteristic, mechanical properties and microstructure of the sputtered Al and Ti film on quartz and LiTaO3 piezoelectric structure were investigated in this study. The influences of the simulated reflow process and HTS reliability test were studied by using Alpha-step, Nanoindenter and Adhesive force tester on the deposited film. The experimental content of this study includes the relationship between film thickness and film roughness, temperature effect on the film properties, and the influences of temperature on the adhesion between film and structure.
Experimental results show that the roughness of the deposited metallic film increases with increasing sputtering time. Surface properties of the film were varied after simulated reflow process and HTS aging process. It was also found that the influences of the HTS aging time on the mechanical properties and the adhesion of the metallic film depend on factors such as types of piezoelectric substrate and types of the deposited metallic film.
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