A Study on Metallic Electrode Materials of Surface Acoustic Wave Devices
碩士 === 義守大學 === 材料科學與工程學系碩士班 === 93 === The surface characteristic, mechanical properties and microstructure of the sputtered Al and Ti film on quartz and LiTaO3 piezoelectric structure were investigated in this study. The influences of the simulated reflow process and HTS reliability test were stud...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99537812176450420581 |