Development of Pyroelectric Temperature Sensor Based on Cantilever Beam
碩士 === 華梵大學 === 機電工程研究所 === 93 === The development of the infrared sensor based on cantilever beam is carried out by using the pyroelectric response of ZnO to the temperature. The device is fabricated by MEMS processes. The Si3N4 and the controlled thickness Si is used as cantilever beam whereupon i...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/55939943017682283877 |