| Summary: | 碩士 === 華梵大學 === 機電工程研究所 === 93 === The object of this research is to design and prototype a electrothermal actuator system, which including a micro channel, a microvalve, and a micropump, as implementing BioMEMS micromachining technology.
This research has successfully established electrical, thermal, and structural coupled-field mode for designing and analyzing the microactuator system. The geometry of the actuator structure is designed using a CAD utility-Solidwork. Then, the structural design is simulated and verified as investigating the structural stresses and strains, electrical currents and voltages, and thermal temperature distributions using a commercial finite element code- ANSYS. Finally, the main designed structure is simulated using a MEMS development software- MEMS Pro, as to facilitate the microactuator system fabrication processes with higher electro-thermal actuation efficiency.
The goal of this thesis is to fabricate the electro-thermal microactuator as implementing the surface micromachining technique as well as the bulk micromachining technique of BioMEMS technology. Hence, the electro-thermal microactuator is designed and fabricated using both of the TMAH etching and photo-lithography techniques. In addition, the micro-coil in the system is fabricated using the sputtering and sacrificial layer releasing technique, and the expandable membrane of the micropump is accomplished after certain spinning and coating processes using a common silica gel.
During the system testing stage, an infrared ray thermoscope is employed to measure the temperature distributions and dynamics of the coil heat source. Also, a micro coil heating circuit is prototyped and an FFT dynamic signal analyzer is used to analyze the degree of distention for the film as compared to the level of system temperature raise. Finally, a PWM code in VHDL is accomplished to control four valves and a pump of the system, and the flow rate is verified to be 2.4ul/min using a micro-scale apparatus.
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